The Sloan Evaporator contains resistive and e-beam evaporation capabilities and is the workhorse for ohmic contacts and Schottky barriers. The system contains a water cooled copper hearth that can hold up to 4 targets for e-beam evaporation ( for material such as Pt, Ti, Ni, etc…), and a thermal source for both a tungsten boat heater (for materials such as Au, Ge, etc…), and a tungsten basket (for materials such as Al, Zn, etc…). The system is pumped by ion and cryo-pumps for a clean vacuum in the low 10-8 Torr range.
Fabrication Equipment: Dry Etcher
Inductively Coupled Plasma Etching System
Mask Aligner
Nano-imprinter Lithography
Reactive Ion Etching System
Spin Coater/Hot Plate
Sputter Coater
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