Virginia Commonwealth University - Microelectronics Materials & Device Laboratory (MMDL)


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EQUIPMENT

Following is a list of all major equipment in use at MMDL. The equipment is arranged in categories. You may narrow the list by using the Selection tool. We also provide a Search tool to assist you in finding particular equipment.  People who are new to the area of Semiconductor growth should review the information provided on the History and Facilities pages. 

 





Characterization Equipment

AFM

CAFM

Deep Level Transient Spectrometer

E-Beam Lithography

Hall Measurements

I-V & C-V

Low Frequency Noise and Phase Noise Setup

Magnetotransport and magnetooptical measurement system

Microwave Parameterization

MPMS

Near-Field Scanning Optical Microscopy

Photoluminescence

Pulsed Electroluminescent measurements

Scanning Electron Microscope

Surface Profilometer

X-ray Diffraction

Deposition Equipment

HVPE

LPE

MBE 1000

MOCVD

Riber 32

Riber 3200

Sputtering

SVT MBE - GaN

SVT MBE - ZnO

UHVCVD

Fabrication Equipment

Dry Etcher

Evaporator

Inductively Coupled Plasma Etching System

Mask Aligner

Nano-imprinter Lithography

Reactive Ion Etching System

Spin Coater/Hot Plate

Sputter Coater

Support Equipment

Box Furnace 1

Box Furnace 2

Dicing / Cutting Saw

Hydrogen Polishing Station

Outgassing Chamber

Packaging

Polisher

Rapid Thermal Annealing

Tube Furnace

Wet Bench

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